Halocarbon C318 - Octafluorocyclobutane C4F8

C4F8

Halocarbon C318 - Octafluorocyclobutane C4F8 C4F8
Halocarbon C318 - Octafluorocyclobutane C4F8 C4F8
Name：Halocarbon C318 - Octafluorocyclobutane C4F8
Type：C4F8
Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT)
Filling Content: 40kg/cyl
Items Specifications
C4F8 99.9% 99.999%
O2 ≤80 ppmv ≤1.0 ppmv
N2 ≤300 ppmv ≤3.0 ppmv
CO2 ≤50ppmv ≤0.5ppmv
CO ≤30 ppmv ≤0.5 ppmv
CH4 ≤30 ppmv ≤0.5 ppmv
H2O ≤10 ppmv ≤3.0 ppmv
Other Organics ≤600 ppmv ≤5.0 ppmv
Acidity as HCL              ≤1.0 ppmw ≤0.1 ppmw
Transportation
DOT Shipping Name              Octafluorocyclobutane
DOT Classification 2.2
DOT Label              Nonflammable Gas
UN Number              UN 1976
CAS No. 115-25-3
CGA/DISS/JIS 660/716/W22-14L
Shipped as Liquefield Gas
Technical Information
Cylinder State @ 21.1°C              Liquid
Flammable Limits In Air              Non-flammable
Auto Ignition Temperature (°C ) -
Molecular Weight (g/mol) 200.03
Specific gravity (air =1) 7.33
Critical Temperature ( °C ) 115.2


Applications：

Perfluorocyclobutane (C4F8) is used in semiconductor manufacturing as plasma etching of silicon dioxide (SiO2) or silicon layers.

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