Halocarbon 14 - Tetrafluoromethane CF4

CF4

Halocarbon 14 - Tetrafluoromethane CF4 CF4
Halocarbon 14 - Tetrafluoromethane CF4 CF4
Name：Halocarbon 14 - Tetrafluoromethane CF4
Type：CF4
Product Name: Halocarbon 14 - Tetrafluoromethane CF4
Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT)
Filling Content: 30kg/cyl
Items Specifications
CF4 99.9% 99.999%
O2 ≤100 ppmv ≤1.0 ppmv
N2 ≤400 ppmv ≤4.0 ppmv
CO2 ≤80 ppmv ≤0.5 ppmv
CO ≤50 ppmv ≤0.5 ppmv
CH4 ≤50 ppmv ≤0.5 ppmv
Other Halocarbons              ≤100 ppmv ≤2.0 ppmv
H2O ≤10   ppmv ≤2.0   ppmv
SF6 ≤15 ppmv ≤1.0 ppmv
Acidity as HF ≤1.0ppmv ≤0.1ppmv
Transportation
DOT Shipping Name              Tetrafluoromethane, Compressed             
DOT Classification 2.2
DOT Label              Nonflammable Gas
UN Number              UN1982
CAS No. 75-73-0
CGA/DISS/JIS 320/716/W22-14L
Shipped as Compressed Gas             
Technical Information
Cylinder State @ 21.1°C              Gas
Flammable Limits In Air              non-flammable
Auto Ignition Temperature (°C ) -
Molecular Weight (g/mol) 88.01
Specific gravity (air =1) 3.04
Critical Temperature ( °C ) -45.65
Critical Pressure ( psig ) 528.459


Applications：

One of the largest comsuption kinds of plasma etching gases in microelectronics industry  , also widely used in surface cleaning of electronic device , manufacture of solar cell, laser technology , gas phase insulation , subzero refrigeration , leakage inspection agent and decontaminant of manufacture of printed circuit.

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