Halocarbon 41 - Fluoromethane CH3F

CH3F

Halocarbon 41 - Fluoromethane CH3F CH3F
Halocarbon 41 - Fluoromethane CH3F CH3F
Name：Halocarbon 41 - Fluoromethane CH3F
Type：CH3F
Product Name: Halocarbon 41 - Fluoromethane CH3F
Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT)
Filling Content: 40kg/cyl
Items Specifications
CH3F 99.5% 99.995%
O2 ≤20  ppbv ≤5  ppmv
N2 ≤70 ppbv ≤20 ppmv
CO2 ≤10 ppmv
CO ≤10 ppmv
CH4 ≤5 ppmv
H2O ≤10 ppbv ≤2 ppmv
Transportation
DOT Shipping Name              Fluoromethane
DOT Classification 2.1
DOT Label              Inflammable Gas
UN Number              UN2810
CAS No. 593-53-3
CGA/DISS/JIS 350/724/W22-14L
Shipped as Liquefield Gas
Technical Information
Cylinder State @ 21.1°C              Liquid
Flammable Limits In Air              Non-flammable             
Auto Ignition Temperature (°C ) -18
Molecular Weight (g/mol) 34.03
Specific gravity (air =1) 1.18
Critical Temperature ( °C ) 45


Applications：

In semiconductor manufacturing, fluoromethane is a plasma etching gas of silicon compound films.

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