Halocarbon 23 - Trifluoromethane CHF3

CHF3

Halocarbon 23 - Trifluoromethane CHF3 CHF3
Halocarbon 23 - Trifluoromethane CHF3 CHF3
Name：Halocarbon 23 - Trifluoromethane CHF3
Type：CHF3
Product Name: Halocarbon 23 - Trifluoromethane CHF3             
Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT)
Filling Content: 30kg/cyl
Items Specifications
CHF3               99.9995%
O2 ≤1.0 ppmv
N2 ≤4.0 ppmv
CO2 ≤0.5 ppmv
CO ≤0.5 ppmv
CH4 ≤0.5 ppmv
Other Organics ≤2.0 ppmv
H2O ≤2.0 ppmv
Acidity as HCL ≤0.1 ppmv
Transportation
DOT Shipping Name              Trifluoromethane
DOT Classification 2.2
DOT Label              Nonflammable Gas
UN Number              UN 1984
CAS No. 75-46-7
CGA/DISS/JIS 660/716/W22-14L
Shipped as Liquefied Gas
Technical Information
Cylinder State @ 21.1°C              Liquid
Flammable Limits In Air              Non-flammable             
Auto Ignition Temperature (°C ) -
Molecular Weight (g/mol) 70
Specific gravity (air =1) 2.436
Critical Temperature ( °C ) 178.43


Applications：

· Trifluoromethane (CHF3) is used in plasma etching of silicon oxide or nitride layers.                                                                   

· CHF3 is a low temperature refrigerant. It is replacing chlorodifuoromethane (R22 or CHF2Cl).

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