Hexafluoroethane C2F6

C2F6

Hexafluoroethane C2F6 C2F6
Hexafluoroethane C2F6 C2F6
Name：Hexafluoroethane C2F6
Type：C2F6
Product Name: Hexafluoroethane  C2F6
Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT)
Filling Content: 40kg/cyl
Items Specifications
C2F6 99.9% 99.999%
O2 ≤80 ppmv ≤1.0 ppmv
N2 ≤300 ppmv ≤4.0 ppmv
CO2 ≤50ppmv ≤0.5ppmv
CO ≤30 ppmv ≤0.5 ppmv
CH4 ≤30 ppmv ≤0.5 ppmv
H2O ≤10 ppmv ≤1.5 ppmv
CF4 ≤100 ppmv ≤1.0 ppmv
Other Organics ≤400 ppmv ≤2.0 ppmv
Acidity as HCL              ≤1.0 ppmw ≤0.1 ppmw
Transportation
DOT Shipping Name              Hexafluoroethane，Compressed            
DOT Classification 2.2
DOT Label              Nonflammable Gas
UN Number              UN2193
CAS No. 76-16-4
CGA/DISS/JIS 660/716/W22-14L
Shipped as liquefield gas
Technical Information
Cylinder State @ 21.1°C              Liquid
Flammable Limits In Air              Nonflammable
Auto Ignition Temperature (°C ) -
Molecular Weight (g/mol) 138.01
Specific gravity (air =1) 4.82
Critical Temperature ( °C ) 19.65
Critical Pressure ( psig ) 417.5


Applications：Insulation gas and plasma etching agent .

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