Boron Trichloride BCl3

BCI3

Boron Trichloride BCl3 BCI3
Boron Trichloride BCl3 BCI3
Name：Boron Trichloride BCl3
Type：BCI3
Product Name: Boron Trichloride BCl3
Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT)            
Filling Content: 50kg/cyl
Items Specifications
BCl3 99.9% 99.999%
Cl2 ≤100 ppmw             -
COCl2 ≤100 ppmw             -
O2 - ≤1.0 ppmv            
N2 - ≤1.0 ppmv            
CO2 - ≤1.0 ppmv            
CO - ≤1.0 ppmv            
H2O - -
Transportation
DOT Shipping Name              Boron Trichloride
DOT Classification 2.3
DOT Label              Poisonous gas/breathing hazard, corrosive
UN Number              UN1741
CAS No. 10294-34-5
CGA/DISS/JIS/BS341/DIN477 660/634/W22-14L
Shipped as              Liquefied Gas             
Technical Information
Cylinder State @ 21.1°C              Liquid
Flammable Limits In Air              Non-flammable             
Auto Ignition Temperature (°C ) -
Molecular Weight (g/mol) 117.17
Specific gravity (air =1) 4.04
Critical Temperature ( °C ) 178.8
Critical Pressure ( psig ) 546.6


Applications：

. In semiconductor manufacturing, boron trichloride is used for p-type diffusion on silicon wafers.  

. Ion implantation.  
. Metal plasma etching.  
. In various chemical reactions.

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