Nitrogen Trifluoride NF3

NF3

Nitrogen Trifluoride NF3 NF3
Nitrogen Trifluoride NF3 NF3
Name：Nitrogen Trifluoride NF3
Type：NF3
Product Name:  Nitrogen Trifluoride NF3 
Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT)
Filling Content: 20kg/cyl
Items Specifications
NF3 99.99%
O2 ≤3.0 ppmv
N2 ≤5.0 ppmv
CO2 ≤1.0 ppmv
CO ≤1.0 ppmv
CH4 ≤1.0 ppmv
H2O ≤1.0 ppmv
CF4 ≤1.0 ppmv
N2O ≤2.0 ppmv
SF6 ≤1.0 ppmv
HF ≤1.0 ppmv
Transportation
DOT Shipping Name  Nitrogen Trifluoride
DOT Classification 2.2
DOT Label   Nonflammable Gas and Oxidizer 
UN Number  UN 2451
CAS No. 7783-54-2
DISS/JIS/DIN477 640/W22-14L/NO.6
Shipped Liquefied Gas
Technical Information
Cylinder State @ 21.1°C  Gas
Flammable Limits In Air  Non-flammable
Auto Ignition Temperature (°C ) -
Molecular Weight (g/mol) 71
Specific gravity (air =1) 2.46
Critical Temperature ( °C ) -39.15
Critical Pressure ( psig ) 632.19
Applications
Used for cleaning CVD Chamber or etching vapor deposition layer ( film ) during the production process of semiconductor ,TFT -LCD and solar cell.


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