Sulfur Hexafluoride SF6

SF6

Sulfur Hexafluoride SF6 SF6
Sulfur Hexafluoride SF6 SF6
Name：Sulfur Hexafluoride SF6
Type：SF6
Product Name: Sulfur Hexafluoride SF6
Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT)
Filling Content: 50kg/cyl
Items Specifications
SF6   IEC 60376 (99.7%) 99.999%
Air ≤ 0.2 % (m/m)
CF4 ≤ 0.24% (m/m)
H2O ≤ 25 ppmw
HF  ≤ 1.0 ppmw
Express as HF  ≤ 1.0 ppmw
Mineral oil  ≤ 10 ppmw
Biological noxious test  Non-toxic 
O2 ≤1.0 ppmv
N2 ≤4.0 ppmv
CO2 ≤0.5ppmv
CO ≤0.5 ppmv
CH4 ≤0.5 ppmv
H2O ≤2.0 ppmv
CF4 ≤1.0 ppmv
Other Halocarbons ≤2.0 ppmv
Acidity as HF  ≤0.1 ppmw
Transportation
DOT Shipping Name  Sulfur Hexafluoride
DOT Classification 2.2
DOT Label  Non-flammable
UN Number  UN 1080
CAS No. 2551-62-4
CGA/DISS/JIS/BS341/DIN477 590 /716/W22-14R/NO.6/NO.6
Shipped as Liquefield Gas
Technical Information
Cylinder State @ 21.1°C  Liquid
Flammable Limits In Air  Non-flammable
Auto Ignition Temperature (°C ) -
Molecular Weight (g/mol) 146.05
Specific gravity (air =1) 5.11
Critical Temperature ( °C ) 45.54
Critical Pressure ( psig ) 530.49
Applications
· As a dielectric in transformers
· As a blanketing agent in metal fabrication
· In semiconductor fabrication: fluorine source for high density plasma etching - offers high selectivity without generating carbon by-products. 


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