Silane SiH4

SiH4

Silane SiH4 SiH4
Silane SiH4 SiH4
Name：Silane SiH4
Type：SiH4
Product Name:  Silane SiH4 
Packing: 40L, 47L, 50L cylinder, Y cylinder (GB, ISO, DOT)
Filling Content: 12kg/cyl， 125kg/cyl
Items Specifications
SiH4 99.9999%
O2+ Ar ≤0.06 ppmv 
N2 ≤0.5 ppmv 
CO2 ≤0.05 ppmv 
H2 ≤20.0 ppmv 
CO ≤0.08 ppmv 
H2O ≤0.5 ppmv 
CH4 ≤0.04 ppmv 
He ≤1.0ppmv 
THC(Sum of C2-C4) ≤0.1 ppmv 
Total Chlorosilanes  ≤0.1 ppmv 
Disilane ≤0.5 ppmv 
Disiloxane ≤0.05 ppmv 
Resistivity, N-type ( ohm-cm) >2500
Transportation
DOT Shipping Name  Silane
DOT Classification 2.1
DOT Label  Flammable gas
UN Number  UN 2203
CAS No. 7803-62-5
CGA/DISS/JIS/BS341/DIN477 350/632/W22-14L/NO.3/NO.1
Shipped as Compressed Gas
Technical Information
Cylinder State @ 21.1°C  Gas
Flammable Limits In Air  1.37-97%
Auto Ignition Temperature (°C ) -50
Molecular Weight (g/mol) 32.117
Specific gravity (air =1) 1.11
Critical Temperature ( °C ) 3.45
Critical Pressure ( psig ) 687.8
Applications
Mainly used for semiconductors , TFT-LCD, Solar cells , Energy-saving Green Glass and applications in vapor deposition thin film precess .


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