Packing: 40L, 47L, 50L cylinder, Y cylinder (GB, ISO, DOT)
Items
Specification
Si2H6
99.998%
O2+ Ar
≤1 ppmv
N2
≤1 ppmv
CO
≤1 ppmv
CO2
≤1 ppmv
THC（CH4）
≤1 ppmv
TCS ( Total Chlorosilanes )
≤ 0.2 ppmv
Higher silane
≤ 50 ppmv
SiH4
≤ 200 ppmv
H2O
≤ 1 ppmv
Transportation
DOT Shipping Name
Flammable Compressed Gas
DOT Classification
2.1
DOT Label
Flammable Gas
UN Number
UN 3161
CAS No.
1590-87-0
CGA/DISS/JIS
350/632/W22-14L
Shipped as
Liquefield Gas
Technical Information
Cylinder State @ 21.1°C
Liquid
Flammable Limits In Air
2-98%
Auto Ignition Temperature (°C )
-100
Molecular Weight (g/mol)
62.22
Specific gravity (air =1)
2.1
Critical Temperature ( °C )
150.85
Critical Pressure ( psig )
747
Applications
.Mainly used for miniaturization semiconductors manufacturing process in the high spedd and low temperature deposition of uniform thin films. .The core applicitons such as process below 20nm node IC semiconductors, advanced memory chips ( DRAM/NAND Flash ), also used in gas mixture for HIT solar cells, LTPS TFT/LCD display panels, and LED.
