Silicon Tetrachloride SiCl4

SiCl4

Name:Silicon Tetrachloride SiCl4
Type:SiCl4
Product Name:  Silicon Tetrachloride SiCl4
Packing: Stainless Steel Drum
Filling Content: 250kg/drum300kg/drum
Items Specifications
SiCl4 99.5% & 99.999%
Resistivity   ≥ 300 ohm-cm
Boron  ≤ 0.3 ppba silicon 
Aluminum ≤ 50 ppbw
Carbon ≤ 1.0 ppma 
Iron ≤ 50  ppbw
Other Chlorosilane  ≤ 600 ppm
Transportation
DOT Shipping Name  Silicon Tetrachloride
DOT Classification 8 ( Corrosive Material )
DOT Label  Corrosive 
UN NO. UN 1818 
CAS No. 1026-04-7
Shipped as Liquefield Gas
Technical Information
Cylinder State @ 21.1°C  Liquid
Flammable Limits In Air  Non-flammable
Auto Ignition Temperature (°C ) -
Molecular Weight (g/mol) 169.89
Specific gravity (air =1) 5.889
Critical Temperature ( °C ) 233.85
Critical Pressure ( psig ) 529.05
Applications
· In semiconductor fabrication, applications of epitaxial silicon .
· In semiconductor fabrication, plasma etching of metals .
· In organo silicon processes .
· In the manufacturing of fused silica fiber.