Description
| Product Name: Halocarbon 41 – Fluoromethane CH3F | ||
| Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT) | ||
| Filling Content: 40kg/cyl | ||
| Items | Specifications | |
| CH3F | 99.5% | 99.995% |
| O2 | ≤20 ppbv | ≤5 ppmv |
| N2 | ≤70 ppbv | ≤20 ppmv |
| CO2 | ≤10 ppmv | |
| CO | ≤10 ppmv | |
| CH4 | ≤5 ppmv | |
| H2O | ≤10 ppbv | ≤2 ppmv |
| Transportation | ||
| DOT Shipping Name | Fluoromethane | |
| DOT Classification | 2.1 | |
| DOT Label | Inflammable Gas | |
| UN Number | UN2810 | |
| CAS No. | 593-53-3 | |
| CGA/DISS/JIS | 350/724/W22-14L | |
| Shipped as | Liquefield Gas | |
| Technical Information | ||
| Cylinder State @ 21.1°C | Liquid | |
| Flammable Limits In Air | Non-flammable | |
| Auto Ignition Temperature (°C ) | -18 | |
| Molecular Weight (g/mol) | 34.03 | |
| Specific gravity (air =1) | 1.18 | |
| Critical Temperature ( °C ) | 45 | |
| Applications | ||
| In semiconductor manufacturing, fluoromethane is a plasma etching gas of silicon compound films. | ||
