Description
| Product Name: Silane SiH4 | |
| Packing: 40L, 47L, 50L cylinder, Y cylinder (GB, ISO, DOT) | |
| Filling Content: 12kg/cyl， 125kg/cyl | |
| Items | Specifications |
| SiH4 | 99.9999% |
| O2+ Ar | ≤0.06 ppmv |
| N2 | ≤0.5 ppmv |
| CO2 | ≤0.05 ppmv |
| H2 | ≤20.0 ppmv |
| CO | ≤0.08 ppmv |
| H2O | ≤0.5 ppmv |
| CH4 | ≤0.04 ppmv |
| He | ≤1.0ppmv |
| THC(Sum of C2-C4) | ≤0.1 ppmv |
| Total Chlorosilanes | ≤0.1 ppmv |
| Disilane | ≤0.5 ppmv |
| Disiloxane | ≤0.05 ppmv |
| Resistivity, N-type ( ohm-cm) | >2500 |
| Transportation | |
| DOT Shipping Name | Silane |
| DOT Classification | 2.1 |
| DOT Label | Flammable gas |
| UN Number | UN 2203 |
| CAS No. | 7803-62-5 |
| CGA/DISS/JIS/BS341/DIN477 | 350/632/W22-14L/NO.3/NO.1 |
| Shipped as | Compressed Gas |
| Technical Information | |
| Cylinder State @ 21.1°C | Gas |
| Flammable Limits In Air | 1.37-97% |
| Auto Ignition Temperature (°C ) | -50 |
| Molecular Weight (g/mol) | 32.117 |
| Specific gravity (air =1) | 1.11 |
| Critical Temperature ( °C ) | 3.45 |
| Critical Pressure ( psig ) | 687.8 |
| Applications | |
| Mainly used for semiconductors , TFT-LCD, Solar cells , Energy-saving Green Glass and applications in vapor deposition thin film precess . | |
